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Development of a 3-DOF Angle Sensor Based on a Single Laser Interference Probe.
Liang Yu1, Xingyang Feng1, Pengcheng Hu1
1Ultra-Precision Optoelectronic Instrument Engineering Center, School of Instrument Science and Engineering, Harbin Institute of Technology, Harbin 150080, China.
Micromachines
|December 23, 2023
Summary
This study introduces a novel wavefront interference method for ultraprecision three-degrees-of-freedom (3-DOF) angle measurements. The developed probe achieves high-resolution pitch, yaw, and roll angle detection for satellite structural deformation monitoring.
Area of Science:
- Optics and Photonics
- Metrology and Measurement Science
- Aerospace Engineering and Technology
Background:
- High-precision satellite development necessitates advanced structural deformation detection.
- Ultraprecision three-degrees-of-freedom (3-DOF) angle measurements are critical for monitoring satellite integrity.
- Existing methods often lack simultaneous pitch, yaw, and roll measurement from a single point.
Purpose of the Study:
- To propose and validate a novel 3-DOF angle measurement method.
- To develop a mathematical model and decoupling algorithm for precise angle sensing.
- To design and construct a simple yet high-performance angle-sensing probe.
Main Methods:
- Wavefront interference principle for angle measurement.
- Development of a mathematical model and decoupling algorithm.
- Design and experimental validation of a novel angle-sensing probe.
Main Results:
- Achieved measurement resolution better than 10 μrad (roll), 1 μrad (pitch), and 1 μrad (yaw).
- Demonstrated short-term stabilities better than 22 μrad (roll), 1.7 μrad (pitch), and 2.0 μrad (yaw).
- Successfully provided high-performance 3-DOF angle measurement using a single probe.
Conclusions:
- The proposed wavefront interference method is feasible for ultraprecision 3-DOF angle measurement.
- The developed angle-sensing probe offers superior resolution and stability for satellite applications.
- This technique enables precise structural deformation detection in high-precision satellite development.

