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High-Performance SAW Resonator with Spurious Mode Suppression Using Hexagonal Weighted Electrode Structure.

Yulong Liu1, Hongliang Wang1, Feng Zhang1

  • 1National Key Laboratory for Electronic Measurement Technology, Key Laboratory of Instrumentation Science and Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China.

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Summary

This study introduces a hexagonal weighted structure to suppress spurious modes in surface acoustic wave (SAW) resonators. Fabricated resonators demonstrate superior performance, offering a viable solution for enhanced device design.

Keywords:
MEMS processhexagonal weighted resonatorhigh Q valuesuppress spurious modessurface acoustic wave (SAW)

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Area of Science:

  • Engineering
  • Materials Science
  • Physics

Background:

  • Surface acoustic wave (SAW) resonators are crucial components in electronics and communication systems.
  • Spurious modes in SAW resonators degrade device performance, necessitating effective suppression strategies.

Purpose of the Study:

  • To propose and validate a novel hexagonal weighted structure for suppressing spurious modes in SAW resonators.
  • To enhance the performance and reliability of SAW resonator devices.

Main Methods:

  • Development of a finite element resonator model to determine interdigital transducer (IDT) and dummy finger weighting parameters.
  • Fabrication of SAW resonators with conventional and hexagonal weighted structures using micro-electromechanical systems (MEMS) processes.
  • Experimental verification through S-parameter testing of fabricated resonators.

Main Results:

  • The hexagonal weighted structure effectively confines spurious waves while minimally impacting the main mode.
  • Fabricated hexagonal weighted SAW resonators exhibited significant spurious mode suppression.
  • Demonstrated superior performance compared to conventional structures, including a higher Q value (10,406), improved return loss (-25.7 dB), and reduced peak sidelobe ratio (19%).

Conclusions:

  • The hexagonal weighted structure presents a feasible and effective solution for suppressing spurious modes in SAW resonators.
  • This design approach leads to improved device characteristics and overall performance.
  • The findings contribute to the advancement of SAW resonator technology for various engineering applications.