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Aspherical interferometric probe with wave-plate-array detection: system design and nonlinearity analysis.

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    This study presents a novel interferometric probe for precise aspheric surface metrology. The developed nonlinear models accurately predict measurement errors caused by alignment deviations, enabling improved accuracy.

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    Area of Science:

    • Optical Engineering
    • Surface Metrology
    • Precision Measurement

    Background:

    • Optical probes are crucial for high-precision surface metrology.
    • Increasing surface complexity demands greater probe flexibility and range of motion.
    • Existing methods face challenges in measuring complex aspheric surfaces accurately.

    Purpose of the Study:

    • To introduce an advanced interferometric probe for measuring aspheric surfaces.
    • To develop comprehensive nonlinear models for predicting measurement errors.
    • To validate the models through simulations and experiments.

    Main Methods:

    • Design of an interferometric probe with a wave-plate-array detector and integrated splitter elements.
    • Development of nonlinear models based on Jones matrix theory to analyze alignment errors.
    • Conducting numerical simulations and optical experiments for model validation.

    Main Results:

    • The integrated probe design enhances dynamic scanning performance and measurement precision.
    • Nonlinear models accurately capture errors stemming from alignment deviations.
    • A 10° alignment error was shown to induce a maximum nonlinear error of 3.02 nm.

    Conclusions:

    • The developed models effectively predict nonlinear errors caused by alignment inaccuracies in optical probes.
    • This research provides a theoretical basis for reducing and compensating for measurement errors.
    • The novel probe design offers improved capabilities for complex surface metrology.