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Black Silicon as Anti-Reflective Structure for Infrared Imaging Applications.

Eivind Bardalen¹, Angelos Bouchouri¹, Muhammad Nadeem Akram¹

¹Department of Microsystems, University of South-Eastern Norway, Raveien 205, 3184 Borre, Norway.

Nanomaterials (Basel, Switzerland)

|January 11, 2024

Summary

This summary is machine-generated.

Black silicon effectively replaces conventional anti-reflection coatings for microbolometer arrays. This alternative material maintains vacuum packaging and offers comparable or wider optical transmission without degrading image quality.

Keywords:

anti-reflection black silicon infrared imaging reactive ion etching

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Area of Science:

Materials Science
Optical Engineering
Semiconductor Devices

Background:

Uncooled infrared cameras use microbolometers requiring vacuum packaging with silicon caps.
Conventional anti-reflection coatings on silicon caps minimize Fresnel reflection losses.

Purpose of the Study:

To investigate black silicon as an alternative to traditional anti-reflection coatings for microbolometer vacuum packaging.
To evaluate the optical transmission and image quality performance of black silicon surfaces.

Main Methods:

Reactive ion etching was employed to create black silicon layers and deep cavities.
Fourier transform infrared spectroscopy assessed optical transmission.
Modulated transfer function measurements evaluated image quality.

Main Results:

Black silicon surfaces demonstrated optical transmission comparable to state-of-the-art anti-reflection coatings in the 8-12 µm range.
Wider bandwidth transmission up to 24 µm was potentially achieved with black silicon.
No degradation in image quality was observed when using black silicon processed wafers as windows.

Conclusions:

Black silicon serves as an effective anti-reflection layer for silicon caps in microbolometer vacuum packaging.
This approach offers a viable alternative to conventional anti-reflection coatings.
The study highlights the potential for enhanced optical performance in infrared imaging systems.