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Application of Through Glass Via (TGV) Technology for Sensors Manufacturing and Packaging

Chen Yu1, Shaocheng Wu1, Yi Zhong1

  • 1School of Electronic Science and Engineering, Xiamen University, Xiamen 361005, China.

Sensors (Basel, Switzerland)
|January 11, 2024
PubMed

Keywords:
MEMS sensorsThrough Glass Viasensor manufacturingsensor packaging

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