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Ultrathin silicon nitride microchip for in situ/operando microscopy with high spatial resolution and spectral

Kunmo Koo1,2, Zhiwei Li3,4, Yukun Liu1,4

  • 1Department of Materials Science and Engineering, Northwestern University, Evanston, IL 60208, USA.

Science Advances
|January 17, 2024
PubMed

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