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High-Precision Positioning Stage Control Based on a Modified Disturbance Observer.

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Summary

This study introduces a self-tuning method to improve high-precision multi-degrees-of-freedom (DOF) positioning systems by addressing cross-decoupling and external disturbances. The novel approach significantly enhances positioning accuracy in industrial applications.

Keywords:
decouplingdisturbance suppressionpositioning controlvoice coil motor

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Area of Science:

  • Robotics and Control Systems
  • Precision Engineering
  • Mechatronics

Background:

  • High-precision positioning systems are vital for industrial automation.
  • Existing multi-degrees-of-freedom (DOF) stages face challenges with cross-decoupling and external disturbances.
  • Controller design for these systems requires robust solutions for accuracy.

Purpose of the Study:

  • To develop a self-tuning approach for simultaneous decoupling and disturbance suppression in multi-DOF stages.
  • To enhance the positioning accuracy of high-precision multi-DOF systems.
  • To provide a method for optimizing disturbance compensation across all DOFs.

Main Methods:

  • Static decoupling using a data-based approach for individual DOF control.
  • Implementation of a self-tuning multi-input, multi-output disturbance observer.
  • Utilization of a comprehensive evaluation index for disturbance compensation optimization.

Main Results:

  • Significant reduction in positioning error standard deviations: 46% (rx), 58% (ry), and 6% (z).
  • Successful demonstration on a real-time control platform for a high-precision multi-DOF stage.
  • Validated effectiveness of the self-tuning approach for simultaneous decoupling and disturbance suppression.

Conclusions:

  • The proposed self-tuning method effectively addresses cross-decoupling and external disturbances in multi-DOF positioning systems.
  • The approach leads to substantial improvements in positioning accuracy.
  • This work offers advancements for the design and control of complex multi-DOF systems.