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Spherical wave illumination scanning digital holographic profilometry.

Kai Wen, Moncy Sajeev Idicula, Michał Józwik

    Optics Express
    |February 1, 2024
    PubMed
    Summary

    This study introduces spherical-wave illumination scanning digital holographic profilometry (SWS-DHP), a novel method for high-NA sample assessment. SWS-DHP enhances information transfer and provides high-quality measurements through advanced algorithms and experimental validation.

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    Area of Science:

    • Optical Metrology
    • Holographic Imaging
    • Nanotechnology

    Background:

    • High numerical aperture (NA) samples present challenges for traditional profilometry due to complex wave interactions.
    • Accurate 3D surface measurement of micro and nanoscale structures is crucial in various scientific and industrial fields.

    Purpose of the Study:

    • To propose and validate a novel scanning solution, spherical-wave illumination scanning digital holographic profilometry (SWS-DHP), for high-NA sample assessment.
    • To demonstrate the superiority of spherical-wave illumination over plane-wave illumination for information transfer in high-NA imaging.
    • To achieve high-quality 3D surface measurements with volumetric aberration compensation.

    Main Methods:

    • Development of a 2F optimization methodology to determine the spherical component of scanning based on object focal length.
    • Implementation of phase space analysis to compare information transfer capabilities of spherical-wave versus plane-wave illumination.
    • Introduction of a shape reconstruction algorithm incorporating volumetric aberration compensation for improved measurement accuracy.
    • Experimental verification using simulations and physical samples with NA up to 0.87.

    Main Results:

    • Spherical-wave illumination scanning digital holographic profilometry (SWS-DHP) demonstrated superior information transfer for high-NA samples compared to plane-wave illumination.
    • The 2F optimization methodology effectively determined scanning parameters for spherical components.
    • The shape reconstruction algorithm successfully compensated for volumetric aberrations, yielding high-quality measurements.
    • Experimental results validated the method's efficacy for samples with NA up to 0.87.

    Conclusions:

    • SWS-DHP is a novel and effective technique for the profilometric assessment of high-NA samples.
    • The proposed method offers significant advantages in information transfer and measurement accuracy for challenging micro/nanoscale surfaces.
    • This technique holds potential for advanced applications requiring precise 3D surface characterization.