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Updated: Jul 4, 2025
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Energy Dispersive X-ray Tomography for 3D Elemental Mapping of Individual Nanoparticles
Published on: July 5, 2016
11.8K
Energy-dispersive X-ray spectroscopy in a low energy electron microscope.
1IBM T.J. Watson Research Center, 1101 Kitchawan Road, Yorktown Heights, NY 10598, USA.
Ultramicroscopy
|February 8, 2024
Summary
This study introduces in-situ Energy-Dispersive X-Ray Spectroscopy (EDS) for Low Energy Electron Microscopy (LEEM). Simple modifications enable elemental analysis in LEEM, a first for this microscopy technique.
Area of Science:
- Materials Science
- Analytical Chemistry
- Surface Science
Background:
- Energy-Dispersive X-Ray Spectroscopy (EDS) is crucial for elemental analysis in electron microscopy.
- Low Energy Electron Microscopy (LEEM) typically lacks the electron energy required for EDS.
- Elemental characterization is generally not feasible with standard LEEM.
Purpose of the Study:
- To demonstrate the feasibility of in-situ EDS spectroscopy within a LEEM instrument.
- To enable elemental analysis for samples studied using LEEM.
- To overcome the limitations of conventional LEEM for elemental composition determination.
Main Methods:
- Modification of a LEEM instrument to incorporate EDS capabilities.
- Utilizing a solid-state EDS detector to capture characteristic X-ray photons.
- Generating and analyzing energy spectra from emitted X-rays.
Main Results:
- Successful implementation of in-situ EDS spectroscopy in LEEM.
- Acquisition of high-quality EDS spectra from samples.
- Demonstration of elemental analysis directly within the LEEM environment.
Conclusions:
- LEEM instruments can be modified for in-situ EDS analysis.
- This advancement allows for elemental characterization previously impossible with LEEM.
- The integration of EDS significantly expands the analytical capabilities of LEEM.
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