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The Design, Modeling and Experimental Investigation of a Micro-G Microoptoelectromechanical Accelerometer with an
Evgenii Barbin1,2, Tamara Nesterenko1,3, Aleksej Koleda1,3
1Research Institute of Microelectronic Systems, The Tomsk State University of Control Systems and Radioelectronics, 634050 Tomsk, Russia.
Sensors (Basel, Switzerland)
|February 10, 2024
Summary
This study presents a novel microoptoelectromechanical accelerometer (MOEMA) utilizing optical tunneling. Prototypes achieved a 2 µg sensitivity threshold, demonstrating potential for advanced integrated inertial devices.
Area of Science:
- Microelectromechanical Systems (MEMS)
- Optical Sensing
- Inertial Navigation
Background:
- Traditional accelerometers face limitations in sensitivity and fabrication.
- Optical measurement principles offer potential for enhanced performance.
Purpose of the Study:
- To design and evaluate a microoptoelectromechanical accelerometer (MOEMA) with optical tunneling.
- To achieve a sensitivity threshold of 1 µg m/s² and assess performance characteristics.
Main Methods:
- Design of the microelectromechanical sensing element (MSE) and optical transducer.
- Utilizing optical tunneling (evanescent coupling) for measurement.
- Experimental testing of three MOEMA prototypes with a capacitive actuator positioning system.
Main Results:
- Achieved a sensitivity threshold of 2 µg.
- Nonlinearity ranged from 0.7% to 1.62% within a ±0.01 g dynamic range.
- Power gain varied from 12.321 mW/g to 26.472 mW/g.
Conclusions:
- The developed MOEMA demonstrates high sensitivity and low nonlinearity.
- The optical transducer positioning system overcomes fabrication challenges.
- The MOEMA shows promise for integrated inertial devices.
