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Data Acquisition Protocol for Determining Embedded Sensitivity Functions

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Thermal Sensitivity of a Microoptoelectromechanical Evanescent-Coupling-Based Accelerometer.

Evgenii Barbin^1,2, Ivan Kulinich¹, Tamara Nesterenko^1,3

¹Research Institute of Microelectronic Systems, The Tomsk State University of Control Systems and Radioelectronics, 634050 Tomsk, Russia.

Sensors (Basel, Switzerland)

|October 29, 2025

Summary

This study analyzes the thermal sensitivity of microoptoelectromechanical (MOEM) accelerometers. Optical components are more sensitive to temperature changes than mechanical ones, impacting device accuracy.

Keywords:

accelerometer coefficient of thermal expansion coupling length directional coupler optical transducer refraction index temperature sensitivity transmission coefficient waveguide

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Area of Science:

Optoelectromechanical Systems
MEMS Technology
Sensor Physics

Background:

Microoptoelectromechanical (MOEM) accelerometers utilize optical principles for sensing.
Thermal sensitivity is a critical factor affecting the performance and accuracy of MOEM devices.
Understanding thermal effects is crucial for designing reliable accelerometers operating across various temperatures.

Purpose of the Study:

To investigate the thermal sensitivity of mechanical and optical transmission coefficients in MOEM accelerometers.
To analyze the contributions of optical and mechanical components to thermal sensitivity.
To evaluate the impact of temperature on accelerometers using directional coupler and resonator transducers.

Main Methods:

Experimental measurement of refractive index dependence on temperature for optical films.
Analysis of thermal effects on material characteristics and internal stresses.
Calculation of thermal sensitivity for optical and mechanical transmission coefficients.

Main Results:

Refractive index of optical films increases with temperature (0.12642 ppm/°C for SiN).
Optical transmission coefficient sensitivity is 580 ppm/°C (directional coupler) and 0.33 °C⁻¹ (resonator).
Mechanical transmission coefficient sensitivity is 120 ppm/°C.

Conclusions:

Optical components significantly contribute to the overall thermal error in MOEM accelerometers.
The thermo-optic effect is a dominant factor, especially in resonator-based transducers.
Thermostatic control is essential for accurate operation of these accelerometers, particularly resonator-based designs.