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Updated: Jul 3, 2025
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Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
Published on: February 4, 2018
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Bidirectional electrostatic MEMS-tunable VCSELs
Optics Letters
|February 15, 2024
Summary
Bidirectional MEMS VCSELs offer faster, more linear wavelength tuning. This breakthrough uses static voltages to amplify tuning, achieving a 54.5 nm range at 2.73 MHz.
Area of Science:
- Optoelectronics
- Photonics
- MEMS technology
Background:
- Microelectromechanical system (MEMS) vertical cavity surface-emitting lasers (VCSELs) are known for rapid, coherent wavelength tuning.
- Standard electrostatic actuation in MEMS VCSELs suffers from nonlinearity and requires high voltages (>100 V) for MHz sweep rates.
Purpose of the Study:
- To present a bidirectional MEMS VCSEL design.
- To achieve substantially linear and amplified wavelength tuning using static voltages.
- To demonstrate high-speed tuning capabilities.
Main Methods:
- Utilized a bidirectional MEMS VCSEL architecture.
- Employed an InP/SOI MEMS bonded structure.
- Applied static voltages to enhance tuning linearity and range.
Main Results:
- Achieved a 54.5 nm wavelength tuning range, limited by gain.
- Tuning was centered around 1586 nm.
- Demonstrated operation at an actuation frequency of 2.73 MHz.
Conclusions:
- The bidirectional MEMS VCSEL effectively addresses the limitations of standard electrostatic actuation.
- Static voltage application enables linear and amplified wavelength tuning.
- This technology facilitates high-speed, wide-range tunable lasers.
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