A reduced-order-model-based equivalent circuit for piezoelectric micro-electro-mechanical-system loudspeakers...

Area of Science:

• Electrical Engineering
• Mechanical Engineering
• Acoustics

Background:

• Piezoelectric micro-electro-mechanical-system (MEMS) speakers are crucial for miniaturized audio devices.
• Existing modeling methods may not fully capture the complex behavior of these speakers.

Purpose of the Study:

• To develop a fast and accurate modeling technique for piezoelectric MEMS speakers.
• To enable efficient design and simulation of next-generation micro-audio systems.

Main Methods:

• A finite element model (FEM)-assisted lumped-parameters equivalent circuit was developed.
• Electro-mechanical parameters were derived from pre-stressed FEM eigenfrequency analysis.
• Acoustic circuit parameters were computed using analytical formulas, including air-gap modeling.

Main Results:

• The proposed model demonstrated excellent agreement with FEM simulations and experimental data for radiated sound pressure level.
• The method accurately accounts for complex geometries and pre-deflection effects on resonance frequency.

Conclusions:

• The FEM-assisted equivalent circuit is a versatile and accurate tool for simulating piezoelectric MEMS speaker performance.
• This approach facilitates the design and optimization of compact and high-performance micro-audio devices.