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Quantitative Atomic-Site Analysis of Functional Dopants/Point Defects in Crystalline Materials by Electron-Channeling-Enhanced Microanalysis
Published on: May 10, 2021
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Atomic Defect Quantification by Lateral Force Microscopy
Yucheng Yang1, Kaikui Xu1, Luke N Holtzman2
1Department of Aerospace and Mechanical Engineering, University of Notre Dame, Notre Dame, Indiana 46556, United States.
ACS Nano
|February 22, 2024
Summary
Lateral Force Microscopy (LFM) can now detect atomic defects in 2D materials, including insulators. This mechanical technique offers a precise way to map defects, advancing the understanding of 2D material properties.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Atomic defects in 2D materials significantly influence their electronic and optoelectronic properties.
- Accurate nanoscale defect quantification is crucial for optimizing 2D material performance but remains challenging, especially for insulating materials.
Purpose of the Study:
- To demonstrate Lateral Force Microscopy (LFM) as a viable technique for observing atomic defects in both semiconducting and insulating 2D materials.
- To overcome limitations in current defect characterization methods for 2D materials.
Main Methods:
- Enhanced LFM sensitivity by analyzing cantilever mechanics.
- Applied LFM to map atomic-scale point defects on bulk Molybdenum Diselenide (MoSe2).
- Correlated LFM findings with Conductive Atomic Force Microscopy (CAFM) measurements.
Main Results:
- LFM successfully located atomic defects on bulk MoSe2 surfaces.
- Direct comparison confirmed LFM-observed point defects correspond to actual atomic defects.
- Demonstrated LFM's capability to characterize defects in insulating hexagonal boron nitride (hBN), including intrinsic and annealing-induced defects.
Conclusions:
- LFM is a versatile mechanical technique for atomic defect characterization in diverse 2D materials, including insulators.
- This method enables defect-property relationship studies without requiring conductive pathways.
- The findings are expected to accelerate 2D materials research by facilitating routine defect analysis.

