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A High-Voltage-Isolated MEMS Quad-Solenoid Transformer with Specific Insulation Barriers for Miniaturized

Changnan Chen1,2, Pichao Pan1,2, Jiebin Gu1

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Micromachines
|February 24, 2024
PubMed

Keywords:
MEMS micro-casting techniqueelectromagnetic couplinggalvanic isolationmicro-transformermonolithic integrationpower supply on chip

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