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Polymeric Microneedle Array Fabrication by Photolithography

Polymeric Microneedle Array Fabrication by Photolithography

Published on: November 17, 2015

Mask-Moving-Lithography-Based High-Precision Surface Fabrication Method for Microlens Arrays.

Jianwen Gong^1,2,3, Ji Zhou^1,3, Junbo Liu^1,3

¹Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 610209, China.

|February 24, 2024

Summary

A new fabrication method for microlens arrays significantly reduces surface errors and roughness. This high-precision technique improves optical performance by minimizing shape deviations and achieving nanometer-level surface smoothness.

Keywords:

inverted air bath reflux method microlens arrays pre-exposure technology

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Area of Science:

Optics and Photonics
Materials Science
Microfabrication Technologies

Background:

Microlens arrays are crucial micro-optical elements for enhancing optical system integration and performance.
Surface shape errors and roughness are key determinants of microlens array optical characteristics and overall performance.

Purpose of the Study:

To propose and validate a high-precision surface fabrication method for microlens arrays.
To reduce surface shape errors and surface roughness in microlens arrays.
To improve the fabrication precision of microlens arrays for advanced optical applications.

Main Methods:

Utilized mask-moving-projection-lithography for precise surface fabrication.
Employed pre-exposure technology to lower photoresist development threshold, mitigating exposure impact on surface shape.
Applied an inverted air bath reflux method post-development to eliminate surface protrusions by achieving a molten state.

Main Results:

Fabricated microlens arrays exhibited a root mean square error below 2.8%.
Achieved surface roughness at the nanometer level, indicating superior surface quality.
Demonstrated significant improvement in the fabrication precision of microlens arrays.

Conclusions:

The proposed mask-moving-projection-lithography method effectively enhances microlens array precision.
The combination of pre-exposure and inverted air bath reflux successfully minimizes surface defects.
This advanced fabrication technique offers a pathway to higher-performance micro-optical systems.