Microfabricated double-tilt apparatus for transmission electron microscope imaging of atomic force microscope probe

Atomic force microscopy (AFM) uses a scanning stylus to directly measure the surface characteristics of a sample. Since AFM relies on nanoscale interaction between the probe and the sample, the resolution of AFM-based measurement is critically dependent on the geometry of the scanning probe tip. This geometry, therefore, can limit the development of related applications. However, AFM itself cannot be effectively used to characterize AFM probe geometry, leading researchers to rely on indirect estimates based on force measurement results. Previous reports have described sample jigs that enable the observation of AFM probe tips using Transmission Electron Microscopy (TEM). However, such setups are too tall to allow sample tilting within more modern high-resolution TEM systems, which can only tilt samples less than a few millimeters in thickness. This makes it impossible to observe atomic-scale crystallographic lattice fringes by aligning the imaging angle perfectly or to view a flat probe tip profile exactly from the side. We have developed an apparatus that can hold an AFM tip for TEM observation while remaining thin enough for tilting, thereby enabling atomic-scale tip characterization. Using this technique, we demonstrated consistent observation of AFM tip crystal structures using tilting in TEM and found that the radii of curvature of nominally identical probes taken from a single box varied widely from 1.4 nm for the sharpest to 50 nm for the most blunt.