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Fabrication and Characterization of Thickness Mode Piezoelectric Devices for Atomization and Acoustofluidics
Published on: August 5, 2020
Fabrication and characterization of smart titanium alloy bolt based on high-frequency piezoelectric thin-film
Min Zhang1, Shuang Liu1, Huan Zhan2,3
1Department of Applied Physics, College of Mathematics and Physics, Chengdu University of Technology, Chengdu 610059, China.
Abstract:
We reported here on the fabrication and characterization of a smart titanium alloy bolt based on a high-frequency piezoelectric thin-film sensor. The thin-film sensor was directly deposited on a titanium alloy bolt head with radio frequency magnetron sputtering and characterized by a scanning electron microscope and an atomic force microscope. The ultrasonic characteristics of the smart bolt, which include a pure and broad frequency spectrum peaked at 14.81 MHz, high measurement accuracy below 3%, and high repeatability free from some interference from bolt detection position change, were fully characterized. No obvious frequency shift was observed with the increase in axial preload. Based on the mono-wave method [TOF (time of flight) of longitudinal mode wave], TOF change increased linearly with preload force in the range of 0-20 kN. With the increase in temperature from 22 to 150 °C, the TOF linearly increases while the longitudinal wave velocity linearly decreases. The results indicate the prepared smart titanium alloy bolt is suitable as a smart aviation and automotive fastener.

