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Updated: Jul 1, 2025

Fabrication of Silica Ultra High Quality Factor Microresonators

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution.

Nils Johan Engelsen¹, Alberto Beccari^2,3, Tobias Jan Kippenberg^4,5

¹Department of Microtechnology and Nanoscience (MC2), Chalmers University of Technology, Gothenburg, Sweden. nils.engelsen@chalmers.se.

Nature Nanotechnology

|March 5, 2024

Summary

Mechanical resonators with high quality factors are crucial for advanced sensors. Dissipation dilution techniques, using tensile strain and geometric nonlinearity, have significantly improved resonator performance.

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Area of Science:

Solid State Physics
Materials Science
Mechanical Engineering

Background:

Mechanical resonators are fundamental components in sensors, transducers, and optomechanical systems.
Mechanical dissipation limits the performance of these devices.
Previous research focused on bulk crystalline resonators, achieving limited quality factors at various temperatures.

Purpose of the Study:

To review advancements in mechanical resonator quality factors over the past 15 years.
To explain the 'dissipation dilution' technique and its role in enhancing resonator performance.
To discuss the current state and future potential of strained nanomechanical resonators.

Main Methods:

Leveraging 'dissipation dilution' by combining static tensile strain and geometric nonlinearity in dynamic strain.
Reviewing experimental and theoretical progress in strained mechanical resonators.
Analyzing the impact of strain and geometry on mechanical dissipation.

Main Results:

Achieved a four-orders-of-magnitude increase in quality factors of strained mechanical resonators.
Surpassed the performance of traditional bulk crystalline resonators at room and cryogenic temperatures.
Demonstrated the effectiveness of dissipation dilution in minimizing mechanical dissipation.

Conclusions:

Strained mechanical resonators utilizing dissipation dilution offer unprecedented quality factors.
Significant potential exists for further improvements in crystalline materials.
These advanced resonators have diverse current and future applications in various technological fields.