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Button shear testing for adhesion measurements of 2D materials.
Josef Schätz1,2, Navin Nayi1, Jonas Weber3,4
1Infineon Technologies AG, Wernerwerkstraße 2, 93049, Regensburg, Germany.
Nature Communications
|March 19, 2024
Summary
Button shear testing quantifies the adhesion of two-dimensional (2D) materials on various substrates. This method is crucial for reliable 2D microelectronic device integration, overcoming challenges like weak adhesion.
Area of Science:
- Materials Science
- Microelectronics Engineering
- Surface Science
Background:
- Two-dimensional (2D) materials offer significant potential for microelectronics.
- Weak adhesion due to chemical inertness hinders reliable integration of 2D materials into functional devices.
- Quantifying adhesion is essential for advancing 2D device integration.
Purpose of the Study:
- To introduce and validate button shear testing as a method for measuring 2D material adhesion.
- To assess the adhesion of graphene, hexagonal boron nitride (hBN), molybdenum disulfide, and tungsten diselenide on silicon dioxide and silicon nitride.
- To identify factors influencing the adhesion of 2D materials.
Main Methods:
- Development of a fabrication process for polymer buttons on 2D materials.
- Establishment of optimal button dimensions and shear testing speeds.
- Application of button shear testing to evaluate adhesion on different substrates.
Main Results:
- Button shear testing demonstrated as a reliable and repeatable adhesion quantification method.
- Low substrate roughness and oxygen plasma treatment enhance 2D material shear strength.
- Thermal annealing improves hBN adhesion on silicon dioxide, correlating with thermal interface resistance.
Conclusions:
- Button shear testing is a viable technique for assessing 2D material adhesion.
- Surface preparation methods significantly impact the adhesion of 2D materials.
- Understanding adhesion is key to unlocking the full potential of 2D materials in microelectronics.

