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Enhancing Manufacturability of SU-8 Piezoelectric Composite Films for Microsystem Applications
Irma Rocio Vazquez1, Zeynel Guler1, Nathan Jackson1,2
1Department of Mechanical Engineering, University of New Mexico, Albuquerque, NM 87131, USA.
Micromachines
|March 28, 2024
Summary
This study introduces novel photodefinable piezoelectric composite films using SU-8 and ceramic powders for micro-electromechanical systems (MEMS). These materials offer high resolution and thickness, improving manufacturability for piezoelectric applications.
Area of Science:
- Materials Science
- Nanotechnology
- Electrical Engineering
Background:
- Piezoelectric thin films are crucial for micro-electromechanical systems (MEMS) but face manufacturing challenges with current ceramic and polymer options.
- Existing polymer piezoelectrics have low Curie temperatures, limiting microfabrication, while polymer composites are difficult to pattern.
- Photodefinable piezoelectric films offer a solution by simplifying manufacturing, but often suffer from poor resolution and thickness control.
Purpose of the Study:
- To enhance the manufacturability of piezoelectric composite films by optimizing process parameters and synthesis of SU-8 based piezo-composites.
- To develop high-resolution, thick piezoelectric films compatible with non-cleanroom environments.
- To investigate the integration of barium titanate (BTO) and lead zirconate titanate (PZT) powders into SU-8 photoresist.
Main Methods:
- Integration of piezoelectric ceramic powders (BTO and PZT) into SU-8 photoresist formulations.
- Optimization of photolithography processing parameters, including I-line (365 nm) exposure and variations in SU-8 formulations (SU-8 3050 and SU-8 3005).
- Characterization of composite films using UV-Vis spectroscopy for transmittance and X-ray diffraction (XRD) for crystallinity.
Main Results:
- Achieved high-resolution SU-8/piezo composites with resolutions < 2 μm.
- Maintained bulk piezoelectric coefficients (d33) greater than 5 pm/V.
- Developed films with thicknesses exceeding 10 μm and demonstrated significantly enhanced d33 properties in stacked layers.
Conclusions:
- Optimized SU-8 based piezoelectric composites offer a viable solution for high-resolution, thick film fabrication in MEMS.
- The developed materials overcome limitations of traditional piezoelectrics, enabling easier patterning and non-cleanroom manufacturing.
- Further development of stacked layers shows promise for significantly improved piezoelectric performance.
