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Updated: Jul 13, 2025

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate
Published on: June 18, 2020
A Simulated Investigation of Lithium Niobate Orientation Effects on Standing Acoustic Waves
Ranjith D Janardhana1, Nathan Jackson1,2
1Department of Mechanical Engineering, University of New Mexico, Albuquerque, NM 87131, USA.
Abstract:
The integration of high-frequency acoustic waves with microfluidics has been gaining popularity as a method of separating cells/particles. A standing surface acoustic wave (sSAW) device produces constructive interference of the stationary waves, demonstrating an increase in cell separating efficiency without damaging/altering the cell structure. The performance of an sSAW device depends on the applied input signal, design of the IDT, and piezoelectric properties of the substrate. This work analyzes the characteristics of a validated 3D finite element model (FEM) of LiNbO3 and the effect on the displacement components of the mechanical waves under the influence of sSAWs by considering XY-, YX-, and 1280 YX-cut LiNbO3 with varying electrode length design. We demonstrated that device performance can be enhanced by the interference of multiple waves under a combination of input signals. The results suggest that 1280 YX-cut LiNbO3 is suitable for generating higher-amplitude out-of-plane waves which can improve the effectiveness of acoustofluidics-based cell separation. Additionally, the findings showed that the length of the electrode impacts the formation of the wavefront significantly.
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