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Area of Science:

  • Energy Harvesting
  • Microelectromechanical Systems (MEMS)
  • Magnetics

Background:

  • Microelectromechanical systems (MEMS) vibration energy harvesters face challenges in power density and bandwidth.
  • Magnetic forces have been explored to create nonlinear vibration structures for wider bandwidths, but monolithic integration and magnet configuration optimization remain difficult.

Purpose of the Study:

  • To investigate the effects of three distinct magnetic configurations on bandwidth and power generation in MEMS vibration energy harvesters.
  • To evaluate the use of attractive and repulsive magnetic forces for optimizing energy harvesting performance.

Main Methods:

  • Developed a piezoMEMS device for vibration energy harvesting.
  • Monolithically integrated a thick embedded permanent magnet (Neodymium-Iron-Boron - NdFeB) film.
  • Tested three different magnetic configurations (attractive, repulsive, combined) for in-plane and out-of-plane setups.

Main Results:

  • Repulsive magnetic forces significantly increased bandwidth from <1 Hz to >7 Hz for both in-plane and out-of-plane configurations.
  • Attractive magnetic forces enhanced power density but reduced bandwidth.
  • Combining attractive and repulsive forces in a single device led to improvements in both power and bandwidth.

Conclusions:

  • Optimized magnetic configurations are crucial for enhancing MEMS vibration energy harvesting performance.
  • Repulsive forces are effective for widening bandwidth, while attractive forces improve power density.
  • A hybrid approach combining attractive and repulsive forces offers a promising strategy for simultaneous improvements in power and bandwidth for low-acceleration, low-frequency applications.