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Microcracking in concrete refers to the tiny cracks that can form within the material even before any external load is applied. These microcracks typically occur at the interface between the coarse aggregate and the hydrated cement paste, often as a result of differential volume changes prompted by variations in stress-strain behavior, as well as thermal and moisture movement. Initially, these microcracks remain stable and do not grow substantially until the concrete is stressed to about 30...

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Area of Science:

  • Materials Science
  • Chemical Engineering
  • Nanotechnology

Background:

  • Semiconductor fabrication faces challenges with nanoscale wet etching of dummy gates.
  • Existing theories on etching suppression mechanisms lack direct observational evidence.

Purpose of the Study:

  • Investigate the limiting factors of silicon etching kinetics at the nanoscale using tetramethylammonium hydroxide.
  • Provide a comprehensive understanding of scale-dependent fabrication constraints.

Main Methods:

  • Liquid-phase transmission electron microscopy (LP-TEM)
  • Three-dimensional electron tomography
  • First-principles calculations

Main Results:

  • Observed suppressed chemical reactions at the nanoscale.
  • Identified unstripping phenomena and stochastic etching behaviors.
  • Demonstrated scale-dependent differences compared to macroscopic etching.

Conclusions:

  • Direct observation reveals novel nanoscale etching phenomena.
  • Understanding these scale-dependent factors is crucial for advancing semiconductor fabrication.
  • Insights pave the way for developing improved fabrication solutions.