A versatile setup for nanosecond laser polishing processes with in situ analysis capabilities

Laser polishing of material surfaces is a complex process depending on many variable parameters, such as, e.g., the properties of the used laser and optics (wavelength, pulse duration, fluence, and profile), as well as the processing (spot size, feed rate, and line or point overlap), and the thermodynamical properties of the material to be polished (heat capacity, heat conduction, etc.). For the successful laser polishing of any material, a systematic variation of all the process parameters is required to obtain satisfactorily polished surfaces with an appropriate set of parameters for the material of interest. In order to allow systematic studies of laser polishing processes, a new setup employing a highly stable nanosecond laser with an adjustable wavelength has been realized. The sample is located in a small high-vacuum chamber with the capability of introducing additional gases in a controlled manner, and the entire chamber is scanned in the beam to allow laser polishing of selected spots, lines, or larger areas. The setup is fully remote-controlled and allows in situ inspection of the initiated processes by means of a long-range microscope, electrical measurements, reflected laser light from the sample surface, and an analysis of the vacuum within the process chamber. The main properties of the setup will be presented, and some exemplary results on niobium and molybdenum metal samples will be discussed.