Induced quantum dot probe for material characterization

Yun-Pil Shim1,2, Rusko Ruskov1,2, Hilary M Hurst1

  • 1Laboratory for Physical Sciences, College Park, Maryland 20740, USA.

Applied Physics Letters
|April 15, 2024
PubMed
Summary

This study introduces a non-destructive method to characterize semiconductor wafers by measuring induced quantum dots. This technique uses a probe chip to measure critical device parameters for quantum computing applications.