Modular slot-die coater for in situ grazing-incidence x-ray scattering experiments on thin films

Manuel A Reus1, Thomas Baier1, Christoph G Lindenmeir1

  • 1Technical University of Munich, TUM School of Natural Sciences, Department of Physics, Chair for Functional Materials, James-Franck-Str. 1, 85748 Garching, Germany.