A Temperature Compensation Approach for Micro-Electro-Mechanical Systems Accelerometer Based on Gated Recurrent

Rubiao Cui1, Jingzehua Xu1, Botao Huang2

  • 1Tsinghua Shenzhen International Graduate School, Tsinghua University, Shenzhen 518055, China.

Micromachines
|April 27, 2024
PubMed
Summary

We developed a novel algorithm to improve MEMS accelerometer accuracy by reducing noise and temperature effects. This fusion method significantly enhances performance, decreasing acceleration random walk by 96.11%.