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Updated: Jun 27, 2025

Characterization of Full Set Material Constants and Their Temperature Dependence for Piezoelectric Materials Using Resonant Ultrasound Spectroscopy

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A Self-Temperature Compensation Barometer Based on All-Quartz Resonant Pressure Sensor.

Dongxiang Han^1,2, Shenfang Yuan¹, Congwei Feng³

¹Research Center of Structural Health Monitoring and Prognosis, State Key Laboratory of Mechanics and Control for Aerospace Structures, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.

Sensors (Basel, Switzerland)

|April 27, 2024

Summary

This summary is machine-generated.

This study presents a self-temperature compensating barometer using a novel quartz resonant sensor. It achieves high accuracy (0.019% F.S.) across wide temperature and pressure ranges, verified by drone flight tests.

Keywords:

MEMS barometer finite element method (FEM)high accuracy quartz crystal resonator temperature compensation

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Area of Science:

Physics
Materials Science
Sensor Technology

Background:

Quartz resonant pressure sensors offer high sensitivity but are susceptible to temperature variations.
Accurate barometric pressure readings are crucial for various applications, including meteorology and navigation.

Purpose of the Study:

To develop a self-temperature compensating barometer.
To improve the accuracy and stability of quartz resonant pressure sensors under varying temperatures.

Main Methods:

Designed and fabricated a novel sensor chip with a double-ended tuning fork (DETF) resonator for pressure sensing and a single-ended tuning fork (SETF) resonator for temperature compensation.
Implemented a polynomial fitting method for temperature compensation.
Conducted experimental tests across a pressure range of 200-1200 hPa and a temperature range of -20°C to +60°C.

Main Results:

Achieved an accuracy of 0.019% F.S. within the tested ranges.
Demonstrated absolute errors within ±23 Pa.
Verified performance through a drone flight test, showing consistency with actual flight trajectory.

Conclusions:

The novel quartz resonant pressure sensor effectively compensates for temperature drift.
The developed barometer exhibits high accuracy and stability for practical applications.
Drone flight tests confirm the sensor's real-world performance and reliability.