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Updated: Jun 27, 2025

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Silicon Metal-oxide-semiconductor Quantum Dots for Single-electron Pumping
Published on: June 3, 2015
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Use of quantum effects as potential qualifying metrics for "quantum grade silicon"
A N Ramanayaka1,2, Ke Tang1,2, J A Hagmann1
1National Institute of Standards & Technology, Gaithersburg, Maryland 20899, USA.
Summary
High-purity silicon enriched to 99.99998% 28Si was fabricated using ion beam deposition. This research establishes new material standards for quantum-grade silicon, comparing its transport properties to natural silicon.
Area of Science:
- Solid-state quantum information science
- Materials science for quantum computing
- Semiconductor device physics
Background:
- Materials deficiencies in solid-state quantum information systems lead to performance limitations such as enhanced relaxation and noise.
- Classical metrics for electronic materials may not adequately qualify materials for quantum devices, necessitating new standards like isotopic enrichment.
- Developing quantum-grade silicon requires establishing reliable metrics and intercomparison methods for novel materials.
Purpose of the Study:
- To investigate the material properties and transport characteristics of locally grown, isotopically enriched 28Si.
- To compare the performance of devices fabricated on 28Si with those on natural abundance silicon (natSi).
- To establish a benchmark for epitaxially grown silicon for quantum applications and contribute to materials standards for quantum-grade silicon.
Main Methods:
- Utilized a custom, mass-selected ion beam deposition technique for isotopic enrichment of 28Si to levels up to 99.99998%.
- Fabricated top-gated Hall bar devices on both isotopically enriched 28Si and adjacent natSi substrates for direct intercomparison.
- Measured electron mobility and Shubnikov-de Haas (SdH) oscillations in longitudinal magnetoresistance at low temperatures (1.9 K).
Main Results:
- Epitaxial silicon achieved 99.99998% 28Si enrichment with chemical purity > 99.97% using molecular beam epitaxy (MBE) techniques.
- Measured maximum electron mobilities of approximately 1740 cm^2/(V*s) on 28Si and 6040 cm^2/(V*s) on natSi at 1.9 K.
- Observed well-developed Shubnikov-de Haas oscillations in both 28Si and natSi devices for magnetic fields B > 2 T, indicating distinct quantum transport phenomena.
Conclusions:
- The study provides crucial transport characteristics for isotopically enriched 28Si, demonstrating its potential for quantum information applications.
- The fabricated devices serve as a benchmark for classical transport in current-state 28Si and epitaxially grown silicon for quantum devices.
- This work underpins the development of materials standards for quantum-grade silicon by offering a comparative analysis of enriched vs. natural silicon.
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