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An Improved Data Processing Algorithm for Spectrally Resolved Interferometry Using a Femtosecond Laser.

Tao Liu1, Hiraku Matsukuma1, Amane Suzuki1

  • 1Precision Nanometrology Laboratory, Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.

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|May 11, 2024
PubMed
Summary
This summary is machine-generated.

This study introduces a new time-shifting algorithm to enhance the accuracy of absolute distance measurements using spectrally resolved interferometry. The improved method significantly reduces deviations compared to conventional techniques.

Keywords:
absolute distance measurementinverse Fourier transformspectrally resolved interferometry

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Area of Science:

  • Optics and Photonics
  • Metrology
  • Laser Technology

Background:

  • Spectrally resolved interferometry with femtosecond lasers is a key technique for absolute distance measurement.
  • Conventional algorithms using inverse Fourier transform exhibit inevitable deviations in output time pulses, limiting measurement accuracy.

Purpose of the Study:

  • To propose and validate an improved data processing algorithm for spectrally resolved interferometry.
  • To enhance the accuracy of absolute distance measurements by addressing deviations in conventional methods.

Main Methods:

  • Theoretical analysis of the deviation source in conventional algorithms.
  • Development and application of a novel time-shifting parameter algorithm.
  • Validation through simulation and experimental measurements.

Main Results:

  • The proposed time-shifting algorithm significantly improves the accuracy of absolute distance measurements.
  • Deviations in output distances were reduced by half, reaching 0.58 μm compared to the conventional algorithm.
  • Measurement uncertainty evaluation using GUM resulted in an expanded uncertainty of 0.71 μm (95% confidence).

Conclusions:

  • The developed time-shifting algorithm offers a more accurate approach for spectrally resolved interferometry.
  • This advancement is crucial for precise absolute distance metrology applications.
  • The method provides a reliable and accurate measurement with quantified uncertainty.