Octave-spanning supercontinuum generation in a CMOS-compatible thin Si₃N₄ waveguide coated with highly nonlinear TeO₂

Supercontinuum generation (SCG) is an important nonlinear optical process enabling broadband light sources for many applications, for which silicon nitride (Si₃N₄) has emerged as a leading on-chip platform. To achieve suitable group velocity dispersion and high confinement for broadband SCG the Si₃N₄ waveguide layer used is typically thick (>∼700 nm), which can lead to high stress and cracks unless specialized processing steps are used. Here, we report on efficient octave-spanning SCG in a thinner moderate-confinement 400-nm Si₃N₄ platform using a highly nonlinear tellurium oxide (TeO₂) coating. An octave supercontinuum spanning from 0.89 to 2.11 µm is achieved at a low peak power of 258 W using a 100-fs laser centered at 1565 nm. Our numerical simulations agree well with the experimental results giving a nonlinear parameter of 2.5 ± 0.5 W^-1m^-1, an increase by a factor of 2.5, when coating the Si₃N₄ waveguide with a TeO₂ film. This work demonstrates highly efficient SCG via effective dispersion engineering and an enhanced nonlinearity in CMOS-compatible hybrid TeO₂-Si₃N₄ waveguides and a promising route to monolithically integrated nonlinear, linear, and active functionalities on a single silicon photonic chip.