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Updated: Jun 25, 2025

All-electronic Nanosecond-resolved Scanning Tunneling Microscopy: Facilitating the Investigation of Single Dopant Charge Dynamics
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Effect of Deposition Pressure and Temperature on Tungsten Thin-Film Heater for Phase-Change Switch Applications

Sheng Qu1,2, Jihua Zhang1,2, Libin Gao1,2

  • 1School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.

Micromachines
|May 25, 2024
PubMed

Keywords:
magnetron sputteringmicroheaterphase-change switchtungsten film

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