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Femtosecond Laser Percussion Drilling of Silicon Using Repetitive Single Pulse, MHz-, and GHz-Burst Regimes

Pierre Balage1, Manon Lafargue1,2, Théo Guilberteau1,3

  • 1Université de Bordeaux-CNRS-CEA, CELIA UMR 5107, 33405 Talence, France.

Micromachines
|May 25, 2024
PubMed

Keywords:
femtosecond burstslaser–material interactionpercussion drillingsiliconultrafast laser processing

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