Spatially Controlled Phase Transition in MoTe2 Driven by Focused Ion Beam Irradiations

Meiling Xiao1,2, Ziyu Wu1,2, Guangjian Liu1,2

  • 1School of Physics and Materials Science, Nanchang University, Nanchang, Jiangxi 330031, People's Republic of China.

Summary

Focused ion beam irradiation controllably converts semiconducting 2H molybdenum ditelluride (MoTe2) to metallic 1T’-like MoTe2. This enables fabrication of nanoscale MoTe2 homojunctions and enhances transistor performance by over two orders of magnitude.