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A Practical Approach for Determination of Thermal Stress and Temperature-Dependent Material Properties in

Yanqiao Yang1, Andreas Winkler1, Atefeh Karimzadeh1

  • 1Leibniz IFW Dresden, SAWLab Saxony, Institute for Emerging Electronic Technologies (IET), Group "Acoustic Microsystems", Helmholtzstr. 20, 01069 Dresden, Germany.

ACS Applied Materials & Interfaces
|June 10, 2024
PubMed

Keywords:
curvature measurement methodindirect methodmultilayer-adapted Stoney equationtemperature-dependent Young’s modulusthermal stress formulathermo-mechanical properties

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