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Phase demodulation method of high line density grating interferometric signal based on wavelet transform.

Zhangning Xie, Tao Jin, Lihua Lei

|June 11, 2024

Summary

This study introduces a robust phase demodulation method for dynamic interferometric signals from high line density gratings. The novel approach enhances precision displacement measurement, especially in low signal-to-noise conditions.

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Area of Science:

Metrology and Measurement Science
Optical Engineering
Signal Processing

Background:

Ultra-precision displacement measurement technology is rapidly miniaturizing, increasing the need for stable interferometric signal processing for high line density gratings.
Low signal-to-noise ratio (SNR) scenarios pose significant challenges for current measurement methods.

Purpose of the Study:

To develop a more stable phase demodulation method for dynamic interferometric signals from high line density gratings.
To improve the accuracy and robustness of displacement measurements, particularly under low SNR conditions.

Main Methods:

Utilized the Morlet wavelet transform to extract instantaneous frequency from interferometric signals.
Integrated instantaneous frequency to calculate relative displacement.
Summed adjacent relative displacements to determine absolute displacement during dynamic grating motion.

Main Results:

Simulations across a 40-70 dB SNR range showed the proposed method is more robust than traditional techniques.
Experimental validation demonstrated a maximum deviation of 0.8 nm compared to traditional methods.
The method proved effective for dynamic motion of high line density gratings.

Conclusions:

The presented phase demodulation method offers enhanced stability and accuracy for high line density gratings.
The technique shows significant potential for improving ultra-precision displacement measurement in challenging low SNR environments.
The method's robustness and minimal deviation confirm its applicability in advanced metrology.