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High-performance mid-infrared linear polarizers using Fabry-Pérot-resonant HSQ-based gratings via a simplified
Xiaojia Liang1,2,3,4, Jingyuan Zhu1,2,3,4, Qing Zhong5
1Institute of Precision Optical Engineering, School of Physics Science and Engineering, Tongji University, Shanghai 200092, China. dongsy@tongji.edu.cn.
Nanoscale
|December 10, 2025
Summary
We developed a simple fabrication method for high-performance mid-infrared (MIR) linear polarizers. This new method achieves excellent transmission and extinction ratios, crucial for advanced imaging and sensing applications.
Area of Science:
- Optics and Photonics
- Materials Science
- Nanotechnology
Background:
- High-performance mid-infrared (MIR) linear polarizers are critical for polarimetric detection, thermal imaging, and environmental monitoring.
- Conventional polarizers struggle to balance high transverse magnetic (TM) wave transmission, extinction ratio (ER), and fabrication simplicity.
Purpose of the Study:
- To present a novel bilayer polarizer design and fabrication process for enhanced MIR linear polarization.
- To overcome the limitations of conventional fabrication methods that degrade polarizer performance.
Main Methods:
- Utilized a 350 nm-pitch bilayer structure with hydrogen-silsesquioxane (HSQ) gratings and collimated aluminum metallization.
- Leveraged HSQ's dual role as dielectric grating and electron-beam resist for streamlined fabrication via direct-write lithography and collimated thermal evaporation.
- Optimized spacer thickness to achieve broadband TM transmission by satisfying Fabry-Pérot resonance.
Main Results:
- Achieved a 94% average TM wave transmission and a 30 dB extinction ratio over a 3-5 μm spectral range.
- Demonstrated a simplified fabrication process by eliminating the need for pattern transfer.
- Successfully reconciled high optical performance with ease of fabrication.
Conclusions:
- The developed HSQ-based bilayer polarizer offers a promising solution for high-performance MIR polarization applications.
- The streamlined fabrication approach enhances the practicality and scalability of MIR polarizer production.
- This work paves the way for advanced MIR sensing and imaging technologies.
