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    Near optical coaxial phase measuring deflectometry (NCPMD) offers a compact design for specular surface measurement. This study presents an error compensation method to improve NCPMD accuracy by addressing plate beamsplitter refraction.

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    Area of Science:

    • Optical metrology
    • Surface metrology
    • Precision engineering

    Background:

    • Phase measuring deflectometry (PMD) is crucial for specular surface form measurement.
    • Near optical coaxial PMD (NCPMD) offers advantages like compactness and reduced shadow errors due to a plate beamsplitter.
    • Plate beamsplitters in NCPMD systems introduce refraction errors affecting measurement accuracy.

    Purpose of the Study:

    • To analyze the shape reconstruction error in NCPMD systems caused by plate beamsplitter refraction.
    • To develop and validate an error compensation method for improving NCPMD accuracy.

    Main Methods:

    • Establishment of a virtual NCPMD system.
    • Development of an error model considering plate beamsplitter refraction.
    • Proposal of a beamsplitter calibration method and a ray tracing algorithm for error compensation.

    Main Results:

    • Quantification of shape reconstruction errors attributable to the plate beamsplitter.
    • Demonstration of effective error compensation using the proposed calibration and ray tracing methods.
    • Experimental validation confirming improved measurement accuracy of the NCPMD system.

    Conclusions:

    • Refraction through the plate beamsplitter is a significant error source in NCPMD systems.
    • The proposed error compensation strategy effectively mitigates these errors, enhancing measurement precision.
    • This work contributes to more accurate and reliable specular surface metrology using NCPMD.