Position Feedback-Control of an Electrothermal Microactuator Using Resistivity Self-Sensing Technique

The self-sensing technology of microactuators utilizes a smart material to concurrently actuate and sense in a closed-loop control system. This work aimed to develop a position feedback-control system of nickel electrothermal microactuators using a resistivity self-sensing technique. The system utilizes the change in heating/sensing elements' resistance, due to the Joule heat, as the control parameter. Using this technique, the heating/sensing elements would concurrently sense and actuate in a closed loop control making the structures of microactuators simple. From a series of experiments, the proposed self-sensing feedback control system was successfully demonstrated. The tip's displacement error was smaller than 3 µm out of the displacement span of 60 µm. In addition, the system was less sensitive to the abrupt temperature change in surroundings as it was able to displace the microactuator's tip back to the desired position within 5 s, which was much faster than a feed-forward control system.