You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: Jun 22, 2025

Use of Sacrificial Nanoparticles to Remove the Effects of Shot-noise in Contact Holes Fabricated by E-beam Lithography
Published on: February 12, 2017
Arushi Pradhan1, Luke A Thimons1, Nickolay Lavrik2
1Department of Mechanical Engineering and Materials Science, University of Pittsburgh, 3700 O'Hara St., Pittsburgh, Pennsylvania 15208, United States.
This study shows grayscale electron-beam lithography can create multiscale surface textures to control adhesion. While precise height control is challenging, the method offers a science-guided approach to tailor surface performance.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: