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Updated: Jun 22, 2025

Fabrication and Testing of Microfluidic Optomechanical Oscillators
Published on: May 29, 2014
Elastic moduli from crystalline micro-mechanical oscillators carved by focused ion beam
Amelia Estry1, Carsten Putzke1,2, Chunyu Guo1,2
1Institute of Materials (IMX), Ecole Polytechnique Fédérale de Lausanne (EPFL), 1015 Lausanne, Vaud, Switzerland.
Abstract:
The elastic moduli provide unique insights into the thermodynamics of quantum materials, particularly into the symmetries broken at their phase transition. Here, we present a workflow to carve crystalline resonators via focused ion beam milling from small and oddly shaped crystals unsuitable for traditional measurements of elasticity. The accuracy of this technique is first established in silicon. Next, we showcase the capacity to probe changes in the electronic state with a resolution on the measured resonance frequency as small as 0.01% on YNiO3, a rare-earth perovskite nickelate, in which bulk single crystals have typical length scales of ≈40μm. Here, we observe a sharp 0.2% discontinuity in Young's modulus of an YNiO3 cantilever at a magnetic phase transition. Finally, an additional potential of using free-standing cantilevers as a tool for examining the time-dependence of chemical changes is illustrated by laser-heating YNiO3.
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