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High-Performance Tin Oxide Thin-Film Transistors Realized by Codoping and Their Application in Logic Circuits
Tao Zhang1, Ya-Fen Wei1, Chen-Shuo Zhang1
1Micro&Nano Semiconductor Research Center of Jimei University, School of Ocean Information Engineering, Jimei University, Xiamen 361021, China.
ACS Applied Materials & Interfaces
|July 7, 2024
Summary
Codoping tin oxide (SnO2) with indium and gallium improves thin-film transistors (TFTs). This strategy enhances electrical properties and stability, enabling high-performance electronic devices.
Area of Science:
- Materials Science
- Semiconductor Physics
- Nanotechnology
Background:
- Tin oxide (SnO2) is a low-cost, eco-friendly semiconductor with a wide band gap, suitable for channel materials.
- Bulk SnO2 exhibits high electron mobility, but SnO2 thin-film transistors (TFTs) show moderate performance, limiting applications.
- Existing SnO2 TFTs face challenges in achieving both high electrical performance and operational stability.
Purpose of the Study:
- To enhance the electrical properties and stability of SnO2 TFTs through a codoping strategy.
- To investigate the impact of codoping content on the performance of SnO2 TFTs.
- To demonstrate the potential of codoped SnO2 TFTs in practical electronic circuits.
Main Methods:
- A codoping strategy using indium (In) and gallium (Ga) was employed to modify the SnO2 lattice.
- Comparative analysis of doped and undoped SnO2 thin films and their corresponding TFTs.
- Investigation of the effect of varying codopant concentrations on device characteristics.
Main Results:
- Codoping effectively reduced impurity-induced strain by leveraging differences in ionic radii.
- Optimal codoped SnO2 (TIGO) TFTs achieved a field-effect mobility of 15.9 cm²/V·s, a threshold voltage of 0.2 V, and an on-to-off current ratio of 2.2 × 10⁷.
- The TIGO TFTs exhibited excellent stability under bias stress, with small threshold voltage shifts, and were used to build a high-gain (10.76) unipolar inverter.
Conclusions:
- Codoping SnO2 with In and Ga is an effective strategy to overcome the performance limitations of SnO2 TFTs.
- The optimized TIGO TFTs demonstrate superior electrical performance and stability, suitable for advanced electronic applications.
- This study validates the potential of codoped SnO2 for next-generation electronic devices.
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