Sub-Micron Replication of Fused Silica Glass and Amorphous Metals for Tool-Based Manufacturing

Sebastian Kluck1, Richard Prediger1, Leonhard Hambitzer1

  • 1Laboratory of Process Technology, NeptunLab, Department of Microsystems Engineering (IMTEK), University of Freiburg, 79108, Freiburg im Breisgau, Germany.

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