Vibration-resistant Fizeau interferometry using three-cavity multiplexing

This study demonstrates a three-cavity multiplexing vibration-resistant Fizeau interferometry (TCM). The method injects a vibration-measurement pass (VMP), which utilizes three-cavity hybrid interference for the transmission of phase and vibration information, to the Fizeau phase-measurement pass (PMP). Moreover, the VMP is demultiplexed using the temporal difference of mixed fringes and synchronous phase-shifting phase extraction of difference fringe to obtain the vibration information, which is then used to calculate the measured phase combined with PMP. The feasibility and performance of the TCM are demonstrated experimentally. To the best of our knowledge, this is the first proposal of the TCM that not only solves the effect of vibration and null-fringe demodulation but also features a common path, simple testing process, and low system complexity.