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Updated: Jun 20, 2025

Implementation of a Reference Interferometer for Nanodetection
Published on: April 26, 2014
Jipeng Xu1,2, Yuanhao Mao1, Zhipeng Li3
1College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, China.
Researchers developed a simplified optical nanometrology method for precise object alignment and position monitoring. This new technique achieves 2nm resolution without complex setups, enhancing smart manufacturing and force sensing applications.
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