Soft x-ray high diffraction efficiency and spectral flux laminar-type W/B4C multilayer diffraction grating for

M Koike1,2,3, T Hatano2, A S Pirozhkov1

  • 1Kansai Institute for Photon Science (KPSI), National Institutes for Quantum Science and Technology (QST), Kizugawa, Kyoto 619-0215, Japan.

Summary

New multilayer diffraction gratings significantly enhance soft x-ray spectrograph sensitivity for detecting elements like iron, copper, and zinc. These improved gratings offer 3.2-8.2 times higher spectral flux without compromising spectral resolution.