A two-dimensional calibration for resolving nano-positioner pedestal micro-deformation crosstalk

Area of Science:

• Precision Engineering
• Nanotechnology
• Control Systems

Background:

• Nano-positioners are crucial for high-precision tasks.
• Micro-deformation of the sensor pedestal, caused by piezoelectric actuator forces, introduces significant crosstalk errors.
• These errors have been largely overlooked in uncalibrated closed-loop control systems.

Purpose of the Study:

• To develop a two-dimensional calibration method to resolve nano-positioner pedestal micro-deformation crosstalk errors.
• To enhance the accuracy and reduce coupling crosstalk errors in nano-positioner systems.
• To provide a method effective for compact nano-positioners with pedestal deformation.

Main Methods:

• Characterizing the deformation of a two-degree-of-freedom parallel-symmetric decoupled nano-positioner.
• Proposing a two-dimensional calibration matrix to suppress inter-axis crosstalk.
• Implementing and validating the calibrated closed-loop feedback control system.

Main Results:

• The calibrated system reduced X-axis and Y-axis coupling crosstalk errors to 1/67th and 1/18th, respectively.
• Positioning accuracy was enhanced by 11.8 times for the X-axis and 17 times for the Y-axis.
• Demonstrated significant improvement over uncalibrated systems.

Conclusions:

• The proposed 2D calibration method effectively mitigates crosstalk errors in nano-positioners with pedestal deformation.
• The technique substantially improves positioning accuracy, offering a crucial reference for future nano-positioner designs.
• This research addresses a previously overlooked error source, advancing the field of precision motion control.