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Updated: Jun 19, 2025

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Shot noise-mitigated secondary electron imaging with ion count-aided microscopy.

Akshay Agarwal1, Leila Kasaei2, Xinglin He1

  • 1Department of Electrical and Computer Engineering, Boston University, Boston, MA 02215.

Proceedings of the National Academy of Sciences of the United States of America
|July 25, 2024
PubMed
Summary

Ion count-aided microscopy (ICAM) enhances nanoscale imaging by reducing noise and improving quantification. This quantitative imaging technique allows for lower particle doses, enabling the study of delicate samples with greater accuracy.

Keywords:
estimationhelium ion microscopysecondary electronsshot noise

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Area of Science:

  • Nanoscale imaging
  • Quantitative microscopy
  • Charged particle beam instrumentation

Background:

  • Nanoscale imaging relies on detecting secondary electrons from charged particle beams.
  • Image quality is limited by measurement noise and incident particle dose, especially for sensitive samples.
  • Current methods do not fundamentally address noise sources or provide quantitative scaling.

Purpose of the Study:

  • To introduce a quantitative imaging technique, ion count-aided microscopy (ICAM), for improved nanoscale imaging.
  • To reduce source shot noise and enable accurate scaling of images.
  • To facilitate imaging of dose-sensitive and fragile samples.

Main Methods:

  • Developed ICAM, a technique using statistically principled estimation of secondary electron yield.
  • Implemented a change in data collection during the imaging process.
  • Applied ICAM to helium ion microscopy for experimental validation.

Main Results:

  • ICAM substantially reduces source shot noise in nanoscale imaging.
  • Demonstrated a 3x dose reduction in helium ion microscopy.
  • Empirical results closely matched theoretical performance predictions.

Conclusions:

  • ICAM offers a quantitative approach to nanoscale imaging, overcoming limitations of existing methods.
  • The technique enables imaging of dose-sensitive and fragile samples.
  • ICAM may increase the attractiveness of using heavier particles for advanced imaging applications.