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Piezoelectric Micromachined Microphone with High Acoustic Overload Point and with Electrically Controlled Sensitivity
Libor Rufer1, Josué Esteves2, Didace Ekeom3
1ADT MEMS, 360 Rue Taillefer, F-38140 Rives, France.
Micromachines
|July 27, 2024
Summary
Piezoelectric micro-electromechanical-system (MEMS) microphones offer improved acoustic overload points compared to capacitive MEMS microphones. This piezoelectric approach simplifies design and fabrication for high-level acoustic field measurements.
Area of Science:
- Acoustics
- Materials Science
- Electrical Engineering
Background:
- Capacitive micro-electromechanical-system (MEMS) microphones are advanced but have limitations in acoustic overload point (AOP).
- Measuring high-level acoustic fields requires microphones with enhanced performance beyond current capacitive MEMS technology.
Purpose of the Study:
- To propose and discuss piezoelectric MEMS microphones as a solution for measuring high-level acoustic fields.
- To explore the advantages of piezoelectric coupling over capacitive coupling in MEMS microphone design.
Main Methods:
- Fabrication of novel MEMS microphones utilizing the piezoelectric effect of aluminum nitride.
- Design variations of piezoelectric structures and investigation of electrically controlled sensitivity.
Main Results:
- Piezoelectric MEMS microphones eliminate the need for a fixed electrode, simplifying design and fabrication.
- This approach shows potential for significantly improving the acoustic overload point (AOP).
Conclusions:
- Piezoelectric MEMS microphones offer a promising alternative to capacitive MEMS microphones for high-level acoustic measurements.
- The technology is suitable for harsh environmental applications and allows for tunable sensitivity.
